Handbook of vacuum science and technology / 
edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III. 
 - San Diego, CA :  Academic Press,  c1998. 
 - xxii, 835 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>
<br/><br/><label>ISBN: </label>0123520657  alk. paper 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Vacuum technology--Handbooks, manuals, etc.
<br/><br/><label>Dewey Class. No.: </label>621.55 HOF