TY  - BOOK
AU  - Hoffman,Dorothy M.
AU  - Singh,Bawa
AU  - Thomas,John H.
TI  - Handbook of vacuum science and technology
SN  - 0123520657
U1  - 621.55 HOF 
PY  - 1998///
CY  - San Diego, CA
PB  - Academic Press
KW  - Vacuum technology
KW  - Handbooks, manuals, etc
N1  - Includes bibliographical references and index; Also issued online
ER  -