Stuart, R. V. <br/><br/>
Vacuum technology, thin films, and sputtering :  an introduction / 
R.V. Stuart. 
 - New York :  Academic Press,  1983. 
 - viii, 151 p. :  ill. ;  24 cm. 
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>0126747806 
<br/><br/><label>LCCN: </label>82013748 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Vacuum technology.<br/>Thin films.<br/>Cathode sputtering (Plating process)
<br/><br/><label>Dewey Class. No.: </label>621.55 STU