TY  - BOOK
AU  - Stuart,R.V.
TI  - Vacuum technology, thin films, and sputtering: an introduction 
SN  - 0126747806
U1  - 621.55 STU   
PY  - 1983///
CY  - New York
PB  - Academic Press
KW  - Vacuum technology
KW  - Thin films
KW  - Cathode sputtering (Plating process)
N1  - Includes index
ER  -